Free PDF Handbook of Plasma Processing Technology: Fundamental, Etching, Deposition and Surface Interactions (Materials Science and Process Technolo
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Handbook of Plasma Processing Technology: Fundamental, Etching, Deposition and Surface Interactions (Materials Science and Process Technolo
Free PDF Handbook of Plasma Processing Technology: Fundamental, Etching, Deposition and Surface Interactions (Materials Science and Process Technolo
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This is a comprehensive overview of the technology of plasma-based processing, written by an outstanding group of 29 contributors.
- Sales Rank: #1242991 in Books
- Published on: 1991-01-14
- Ingredients: Example Ingredients
- Original language: English
- Number of items: 1
- Dimensions: 9.02" h x 1.19" w x 5.98" l, 1.80 pounds
- Binding: Hardcover
- 546 pages
Review
"The text provides and excellent reference for plasma processing." - SAMPE Journal
Most helpful customer reviews
4 of 5 people found the following review helpful.
Lacking detailed description of the plasma-kinetic model
By A Customer
Fair overview of basic plasma processing techniques. Because it's written by various experts in the field, the quality varies from chapter to chapter. The section on reactive ion etching comes highly recommended and is thoroughly referenced.
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